Monolithic 3D integration of silicon transistors: a scalable process for vertically stacking ultrathin (≤10 nm) single-crystalline silicon layers enables multi-tiers of complementary junctionless transistors to be sequentially fabricated on the same starting substrate at low temps with >98% yields
1 June 2026 at 01:30
| | submitted by /u/Litvi [link] [comments] |
